Hexapod for Detector alignment and scanning

Inside the vacuum chamber the high resolution and small size hexapod of type BORA from Symétrie S.A.R.L. (France) is mounted horizontal on the left side and has a payload capacity of 5kg.

On the moving platform of the hexapod and in the center of the image the industrial test camera is mounted. Directly attached to it is the power meter wand detector measuring exactly the light the sensor would receive. On the right side are then baffles to reduce light reflections and stray light which would come on the detector from the light source on the right.

The hexapod can move +- 20mm in the sensor plane XY and +-10mm for Z focusing. Also tilt around every axis is possible to align the sensor absolutely vertical to the incoming beam.