Vacuum generation
Pfeiffer Vacuum HiPace300M magnetically levitated turbo pump with integrated Power-Inverter is the main pump. A powerful but silent and vibration damped oil free scroll-pump from Agilent IDP-15 including inlet valve and exhaust silencer is placed on the floor under the optical table and is therefore near the hanging turbo-pump.
The vacuum on the chamber is measured down to 10-8 mbar with an active Pirani/Cold Cathode gauge and the pressure between the two pumps is measured with an active Piezo-Gauge, which is also accurate at ambient pressure and can therefore be used to stop the venting.
Nitrogen N2 is used to vent the vacuum chamber.
The chamber can be baked-out up to 80°C to improve the vacuum. Temperature measures inside and outside the vacuum chamber are with Thermocouple Type-K and PT1000.